Airco Temescal Cv-8 Manual4/14/2023 ![]() ![]() The Evaporator 2000 system is an automated vacuum process control system for Physical Vapour Deposition (PVD) of metals, and non-metals, consisting of a control cabinet, chamber cart, E-Beam power supply cart, Cryo pump compressor cart and mechanical vacuum pump. This SOP is meant to be used by properly trained operators only. This is an Airco Temescal evaporator modified and automated by Doug Wong in 2000 and is commonly known in the AMPEL facility as the Evaporator 2000 system or the DeeWong Evaporator. Purpose: To describe how to use the evaporator for Physical Vapor Deposition (PVD) by Electron Beam and Resistance Heating. 00: David Webster, TRIUMF, October 22, 1993. Ebeam Evaporator Standard Operating Procedure – Revision 04
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